New technologies of MEMS and further demands on modified control systems in automotive applications must be fulfilled in future. The oppertunities of automotive applications demand higher operation temperatures in harsher environment. New MEMS technologies facilitate the development of such devices for the automotive mass market. Herin, the key technologies and new concepts for sensor devices and systems will be presented.
High temperature pressure sensors - Potentials for new concepts in automotive applications
Hochtemperatur-Drucksensoren - Entwicklungspotential für den Einsatz im Fahrzeug
2001
13 Seiten, 12 Bilder, 1 Tabelle, 11 Quellen
Conference paper
English
High Temperature Pressure Sensors - Potentials for New Concepts in Automotive Applications
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