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    Title :

    Measurement of Sidewall Roughness of InP Etched by RIBE



    Conference:

    Summer topical meeting, Optoelectronic materials growth and processing ; 1994 ; Lake Tahoe; NV



    Publication date :

    1994-01-01


    Size :

    2 pages


    Remarks:

    Contains 4 conferences published jointly. IEEE Cat no 94TH0606-4; Shelving title: LEOS 1994



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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