Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Excimer laser micromachining based on dielectric masks [2246-07]


    Contributors:

    Conference:

    Conference, Laser materials processing and machining ; 1994 ; Frankfurt; Germany



    Publication date :

    1994-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Aluminum surface alloying with mixed excimer laser and CO~2 laser beams [2246-08]

    Liu, Z. / Woellmer, H. / Watkins, K. G. et al. | British Library Conference Proceedings | 1994


    Excimer Laser Micromachining/Marking

    Andrellos, Jack C. / Scaggs, Michael J. / Sowada, Ulrich | SAE | 1989


    Nr. 2246

    DataCite | 1888


    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    Time-resolved diagnostics of energy coupling during material processing with excimer lasers [2246-15]

    Callies, G. / Schittenhelm, H. / Berger, P. et al. | British Library Conference Proceedings | 1994