All-silicon waveguides and bulk-etched alignment structures on (110) silicon for integrated micro-opto-mechanical systems [2686-02]
Conference, Integrated optics and microstructures III ; 1996 ; San Jose; CA
1996-01-01
12 pages
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Optical microspectrometer in SiON slab waveguides [2686-12]
British Library Conference Proceedings | 1996
|Micro-Opto-Mechanical Vibration Sensor Integrated on Silicon
British Library Online Contents | 1999
|British Library Conference Proceedings | 1996
|DataCite | 1897
Laser bending of etched silicon micro-structures
British Library Online Contents | 2001
|