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    Title :

    All-silicon waveguides and bulk-etched alignment structures on (110) silicon for integrated micro-opto-mechanical systems [2686-02]


    Contributors:

    Conference:

    Conference, Integrated optics and microstructures III ; 1996 ; San Jose; CA



    Publication date :

    1996-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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