Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Measurement of F- Ion Density in a Discharge-Pumped ArF Excimer Laser Plasma



    Conference:

    Annual meeting; 9th, IEEE: Lasers and Electro-Optics Society; LEOS '96; 9th annual meeting ; 1996 ; Boston; MA



    Publication date :

    1996-01-01


    Size :

    2 pages


    Remarks:

    Described as proceedings. IEEE cat no: 96CH35895



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Discharge pumped VUV rare-gas excimer laser

    Kubodera, S. / Higashiguchi, T. / Sasaki, W. | IEEE | 2002



    MP3 Discharge Pumped VUV Rare-Gas Excimer Laser

    IEEE | British Library Conference Proceedings | 2002