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    Title :

    Linear and angular velocity and displacement sensors for industrial use based on planar optical technology (Invited Paper) [3099-01]


    Contributors:

    Conference:

    Conference, Micro-optical technologies for measurement, sensors, and microsystems II ; 1997 ; Munich; Germany



    Publication date :

    1997-01-01


    Size :

    8 pages


    Remarks:

    Held in conjunction with the conference on optical inspection and micromeasurement




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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