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    Title :

    Polycapillary collimator for laser-generated plasma source x-ray lithography [3767-05]


    Contributors:

    Conference:

    Conference, EUV, X-ray, and neutron optics and sources ; 1999 ; Denver, CO



    Publication date :

    1999-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    High-uniformity collimator for x-ray proximity lithography [3767-06]

    Cash, W. C. / SPIE | British Library Conference Proceedings | 1999


    Characterization of multifiber polycapillary x-ray collimating optics [3767-12]

    Padiyar, S. D. / Wang, H. / Gubarev, M. V. et al. | British Library Conference Proceedings | 1999


    Diffraction geometry optimization with polycapillary x-ray optics [3767-28]

    Gibson, W. M. / MacDonald, C. A. / Ullrich, J. B. et al. | British Library Conference Proceedings | 1999


    Potential of polycapillary optics for hard x-ray medical imaging applications [3767-13]

    Wang, L. / Gibson, W. M. / MacDonald, C. A. et al. | British Library Conference Proceedings | 1999


    High-power source and illumination system for extreme ultraviolet lithography [3767-20]

    Kubiak, G. D. / Bernardez, L. J. / Krenz, K. D. et al. | British Library Conference Proceedings | 1999