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    Title :

    Micromachining with high-repetition-rate femtosecond laser sources [4088-12]



    Conference:

    1st, International symposium on laser precision microfabrication ; 2000 ; Omiya, Japan



    Publication date :

    2000-01-01


    Size :

    3 pages


    Remarks:

    Described as proceedings. Also known as LPM 2000




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Micromachining using femtosecond lasers [4088-27]

    Tonshoff, H. K. / Ostendorf, A. / Nolte, S. et al. | British Library Conference Proceedings | 2000


    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    Micromachining with ultrafast lasers [4088-28]

    Shihoyama, K. / Furukawa, A. / Bado, P. et al. | British Library Conference Proceedings | 2000


    High-repetition-rate ArF excimer laser for microlithography [4088-80]

    Wakabayashi, O. / Enami, T. / Ishii, K. et al. | British Library Conference Proceedings | 2000


    Micromachining with a frequency-converted diode-pumped Nd:YAG laser [4088-42]

    Hartke, K. / King, K. / Farson, D. F. et al. | British Library Conference Proceedings | 2000