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    Title :

    DTuD2 Transfer of diffractive optical elements into GaAs by use of inductively coupled plasma etching for integration with vertical-cavity surface-emitting lasers


    Contributors:

    Conference:

    Conference, Diffractive optics and micro-optics ; 2000 ; Quebec City, Canada



    Publication date :

    2000-01-01


    Size :

    3 pages


    Remarks:

    Also known as DOMO 2000




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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