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    Title :

    Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM) [4782-35]


    Contributors:
    Yamamura, K. (author) / Mimura, H. (author) / Yamauchi, K. (author) / Sano, Y. (author) / Saito, A. (author) / Kinoshita, T. (author) / Endo, K. (author) / Mori, Y. (author) / Souvorov, A. (author) / Yabashi, M. (author)

    Conference:

    conference, X-ray mirrors crystals and multilayers ; 2002 ; Seattle, WA



    Publication date :

    2002-01-01


    Size :

    6 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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