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    Title :

    High-repetition-rate excimer laser for micromachining [4971-16]


    Contributors:

    Conference:

    Conference; 4th, Gas and chemical lasers and intense beam applications ; 2003 ; San Jose, CA



    Publication date :

    2003-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4971

    DataCite | 1940


    5 kHz high repetition rate excimer laser

    Takagi, S. / Kakizaki, K. / Okamoto, N. et al. | IEEE | 1995


    Excimer Laser Micromachining/Marking

    Andrellos, Jack C. / Scaggs, Michael J. / Sowada, Ulrich | SAE Technical Papers | 1989


    Isolationsprüfer Zchg No. 4971

    Siemens und Halske, Werk, Berlin | TIBKAT | 1896


    High repetition rate KrF excimer laser for microphotolithography

    Kakuno, T. / Enami, T. / Kakizaki, K. | IEEE | 1995