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    Title :

    Packaging MEMS Inertial Sensors at Motorola


    Contributors:

    Conference:

    Annual meeting; 16th, IEEE Lasers & Electro-optics Society; LEOS 2003 ; 2003 ; Tucson, AZ



    Publication date :

    2003-01-01


    Size :

    2 pages


    Remarks:

    IEEE cat. no. 03CH37460




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Packaging MEMS inertial sensors at Motorola

    Li, G. / Mahadevan, D. / Chapman, M. | IEEE | 2003


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | IEEE | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | AIAA | 1998


    Performance of MEMS Inertial Sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | British Library Conference Proceedings | 1998


    Performance of MEMS inertial sensors

    Kourepenis, A. / Borenstein, J. / Connelly, J. et al. | Tema Archive | 1998