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    Title :

    EUV lithography development in Europe: present status and perspectives (Invited Paper) [5196-07]



    Conference:

    Conference, Laser-generated and other laboratory X-ray and EUV sources, optics and applications; Laser-generated and other laboratory X-ray and EUV sources, optics and applications



    Publication date :

    2004-01-01


    Size :

    14 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Rosmej, F. B. / Faenov, A. Y. / Pikuz, T. A. et al. | British Library Conference Proceedings | 2004


    Compact electron-based EUV and ultrashort hard x-ray sources (Invited Paper) [5196-28]

    Egbert, A. / Chichkov, B. N. / SPIE | British Library Conference Proceedings | 2004


    Monochromatic applications of polycapillary optics [5196-47]

    MacDonald, C. A. / Mail, N. / Li, D. et al. | British Library Conference Proceedings | 2004


    X-pinch source size measurements [5196-04]

    Pikuz, S. A. / Song, B. M. / Shelkovenko, T. A. et al. | British Library Conference Proceedings | 2004


    Liquid-metal anode x-ray tube [5196-51]

    David, B. R. / Barschdorf, H. / Doormann, V. et al. | British Library Conference Proceedings | 2004