Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing [5662-69]
International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan
2004-01-01
6 pages
Also known as LPM 2004.
Conference paper
English
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British Library Conference Proceedings | 2004
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