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    Title :

    Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing [5662-69]



    Conference:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Publication date :

    2004-01-01


    Size :

    6 pages


    Remarks:

    Also known as LPM 2004.




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Pulsed laser-induced electrical-current joule heating for crystallization of silicon thin films [5662-76]

    Andoh, N. / Sameshima, T. / SPIE et al. | British Library Conference Proceedings | 2004



    Application of femtosecond pulsed laser for optical devices [5662-30]

    Jee, S. / Woo, J. / Sohn, I. et al. | British Library Conference Proceedings | 2004


    Laser machinable glass [5662-06]

    Koyo, H. / Shojiya, M. / Tsunetomo, K. et al. | British Library Conference Proceedings | 2004


    PLD of high-k dielectric films on silicon [5662-65]

    Ratzke, M. / Kappa, M. / Wolfframm, D. et al. | British Library Conference Proceedings | 2004