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    Title :

    Silicon Based Vibration Sensors For Microelectromechanical Systems



    Conference:

    9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India



    Publication date :

    1999-01-01


    Size :

    6 pages


    Remarks:

    in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





    MicroElectroMechanical Systems

    Gabriel, K. J. / Association for Unmanned Vehicle Systems International | British Library Conference Proceedings | 1997


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    Microelectromechanical Systems (MEMS)

    Ramesham, R. | NTRS | 1999


    Microelectromechanical systems (MEMS)

    Gabriel, K.J. | IEEE | 1997