Silicon Based Vibration Sensors For Microelectromechanical Systems
9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India
1999-01-01
6 pages
in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
MicroElectroMechanical Systems
British Library Conference Proceedings | 1997
|British Library Online Contents | 2006
|Microelectromechanical Systems (MEMS)
NTRS | 1999
|Microelectromechanical systems (MEMS)
IEEE | 1997
|