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    Title :

    High Precision Micro Positioning Systems Used in UHV Applications


    Contributors:

    Conference:

    12th, European space mechanisms and tribology symposium ; 2007 ; Liverpool



    Publication date :

    2007-01-01


    Size :

    43 pages


    Remarks:

    Shelved in Conference Records; Held on CD-ROM



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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