Simulations of Aerodynamic Damping for MEMS Resonators
39th, AIAA international communications satellite systems conference; 39th AIAA Fluid Dynamics Conference 2009 ; 2009 ; San Antonia, TX
2009-01-01
13 pages
Includes bibliographic references and index
Conference paper
English
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Simulations of Aerodynamic Damping for MEMS Resonators
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