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    Title :

    Characterization of gear pumps fabricated by LIGA


    Contributors:
    Deng, K. (author) / Dewa, A. S. (author) / Ritter, D. C. (author) / Bonham, C. (author) / Guckel, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 4 ; 163-167


    Publication date :

    1998-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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