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    Title :

    Micromachined pressure sensors pave way for new process solutions


    Published in:

    CONTROL SOLUTIONS ; 73 , 11 ; 43-52


    Publication date :

    2000-01-01


    Size :

    10 pages


    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.8




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