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    Title :

    Numerical simulation of a polysilicon thermal flexture actuator


    Contributors:
    Kuang, Y. (author) / Huang, Q.-A. (author) / Lee, N. K. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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