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    Title :

    Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography


    Contributors:
    Sato, H. (author) / Houshi, Y. (author) / Shoji, S. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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