Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography
MICROSYSTEM TECHNOLOGIES ; 10 ; 440-443
2004-01-01
4 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension
British Library Online Contents | 2013
|British Library Online Contents | 2000
|British Library Online Contents | 2008
|A vibrating micro-scale CMM probe for measuring high aspect ratio structures
British Library Online Contents | 2010
|Hot embossing of transparent high aspect ratio micro parts
British Library Online Contents | 2014
|