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    Title :

    Anisotropic Si deep beam etching with profile control using SF~6/O~2 Plasma


    Contributors:
    Zou, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 10 , 8/9 ; 603-607


    Publication date :

    2004-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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