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    Title :

    Reliability of MEMS packaging: vacuum maintenance and packaging induced stress


    Contributors:
    Choa, S. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 11 ; 1187-1196


    Publication date :

    2005-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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