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    Title :

    V-shaped micromechanical tunable capacitors for RF applications


    Contributors:
    Cruau, A. l. (author) / Lissorgues, G. l. (author) / Nicole, P. (author) / Placko, D. (author) / Ionescu, A. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 15-20


    Publication date :

    2005-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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