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    Title :

    Active flying-height control slider using MEMS thermal actuator


    Contributors:
    Kurita, M. (author) / Shiramatsu, T. (author) / Miyake, K. (author) / Kato, A. (author) / Soga, M. (author) / Tanaka, H. (author) / Saegusa, S. (author) / Suk, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 4 ; 369-375


    Publication date :

    2006-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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