Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Influence of the frequency on fatigue of directly wafer-bonded silicon


    Contributors:
    Bagdahn, J. r. (author) / Bernasch, M. (author) / Petzold, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 5 ; 430-435


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fatigue of directly wafer-bonded silicon under static and cyclic loading

    Bagdahn, J. / Petzold, M. | British Library Online Contents | 2001


    Electrical Characterization of Directly-Bonded GaAs and Si

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1998


    Wafer Bonded All-Optical Switching Devices

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1996


    Unitized bonded PTFE wafer radial seal

    Jackowski,R.A. / Wagner,J.B. | Automotive engineering | 1988


    Directly Pumped Silicon Lasers

    Shainline, J.M. / Xu, J. | British Library Online Contents | 2008