Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask


    Contributors:
    Li, Y. (author) / Sugiyama, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 227-230


    Publication date :

    2007-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    MEMS-based microgratings: preliminary results of novel configurations [3276-19]

    Castracane, J. / Gutin, M. / SPIE | British Library Conference Proceedings | 1998


    Fabrication of intermediate mask for deep x-ray lithography

    Sheu, J. T. / Chiang, M. H. / Su, S. | British Library Online Contents | 1998


    Photorefractive Lithography In Poly(Methyl Methacrylate) (PMMA)

    Andreas, B. / Peithmann, K. / Soergel, E. et al. | British Library Conference Proceedings | 2003


    Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology

    Coane, P. / Giasolli, R. / Ledger, S. et al. | British Library Online Contents | 2000


    Lithography with UV-LED array for curved surface structure

    Suzuki, S. / Matsumoto, Y. | British Library Online Contents | 2008