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    Title :

    Design and fabrication of a SU-8 based electrostatic microactuator


    Contributors:
    Dai, W. (author) / Lian, K. (author) / Wang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 271-277


    Publication date :

    2007-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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