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    Title :

    Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology


    Contributors:
    Chen, S. C. (author) / Cheng, C. H. (author) / Lin, Y. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 455-463


    Publication date :

    2007-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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