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    Title :

    Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures


    Contributors:
    Vora, K. D. (author) / Peele, A. G. (author) / Shew, B. Y. (author) / Harvey, E. C. (author) / Hayes, J. P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 487-493


    Publication date :

    2007-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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