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    Title :

    Fluid filter fabricated by deep X-ray lithography for micro fluidics


    Contributors:
    Ukita, Y. (author) / Asano, T. (author) / Utsumi, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 435-439


    Publication date :

    2007-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fluidics

    Society of Automotive Engineers | TIBKAT | 1969


    Fluidics.

    NTRS | 1965


    Micro gas bearings fabricated by deep X-ray lithography

    Kim, D. / Lee, S. / Jin, Y. et al. | British Library Online Contents | 2004


    Hydraulic Fluidics

    Taft, C. K. | SAE Technical Papers | 1967


    Micro-structures fabrication on glasses for micro-fluidics by imprinting technique

    Chen, Q. / Milanese, D. / Ferraris, M. | British Library Online Contents | 2009