Fluid filter fabricated by deep X-ray lithography for micro fluidics
MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 435-439
2007-01-01
5 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
TIBKAT | 1969
|NTRS | 1965
Micro gas bearings fabricated by deep X-ray lithography
British Library Online Contents | 2004
|SAE Technical Papers | 1967
|Micro-structures fabrication on glasses for micro-fluidics by imprinting technique
British Library Online Contents | 2009
|