Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect


    Contributors:
    Shyu, R. F. (author) / Yang, H. (author) / Tsai, W. R. (author) / Tsai, J. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 11-12 ; 1601-1606


    Publication date :

    2007-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Concave microlens array mold fabrication in photoresist using UV proximity printing

    Lin, T. H. / Yang, H. / Chao, C. K. | British Library Online Contents | 2007


    Laser microfabrication of photoresist rod array using a microlens array

    Matsuo, S. / Miyamoto, T. / Tomita, T. | IEEE | 2005


    Fabrication of microlens array for the IR by lithographic processes using an inorganic chalcogenide photoresist

    Eisenberg, N. P. / Manevich, M. / Klebanov, M. et al. | British Library Conference Proceedings | 1995


    Fabrication of high-aspect-ratio microstructures using SU8 photoresist

    Liu, G. / Tian, Y. / Kan, Y. | British Library Online Contents | 2005


    Design and fabrication of a micro Alvarez lens array with a variable focal length

    Huang, C. / Li, L. / Yi, A. Y. | British Library Online Contents | 2009