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    Title :

    Micromechanical characterization of electroplated permalloy films for MEMS


    Contributors:
    Li, X. (author) / Ding, G. (author) / Ando, T. (author) / Shikida, M. (author) / Sato, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 1 ; 131-134


    Publication date :

    2008-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83





    EMI Shielding Characteristics Of Permalloy Multilayer Thin Films

    Grimes, C. A. / IEEE; Aerospace and Electronic Systems Society | British Library Conference Proceedings | 1994