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    Title :

    2006 ASME-ISPS/JSME-IIP joint conference on micromechatronics for information and precision equipment, Santa Clara, California, USA


    Contributors:
    Shen, I. Y. (author) / Saegusa, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 8-10 ; 731-732


    Publication date :

    2007-01-01


    Size :

    2 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83