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    Title :

    Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling


    Contributors:
    Bruchmann, C. (author) / Höfer, B. (author) / Schreiber, P. (author) / Eberhardt, R. (author) / Buss, W. (author) / Peschel, T. (author) / Gebhardt, S. (author) / Tünnermann, A. (author) / Beckert, E. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 683-690


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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