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    Title :

    Direct microscale imprinting of Al at room temperature with Si inserts


    Contributors:
    Jiang, J. (author) / Mei, F. (author) / Meng, W. J. (author) / Sinclair, G. B. (author) / Park, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 6 ; 815-819


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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