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    Title :

    Design and control of air bearing precision positioning stage driven by linear motors


    Contributors:
    Congpeng, Z. (author) / Qiang, L. (author)


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    629.4



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