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    Title :

    High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection


    Contributors:
    Lu, J. (author) / Ikehara, T. (author) / Zhang, Y. (author) / Mihara, T. (author) / Itoh, T. (author) / Maeda, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 8 ; 1163-1169


    Publication date :

    2009-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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