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    Title :

    Silicon Waveguide Sidewall Smoothing by KrF Excimer Laser Reformation


    Contributors:
    Shih-Che, H. (author) / Eih-Zhe, L. (author) / Ching-Fuh, L. (author)

    Published in:

    Publication date :

    2009-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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