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    Title :

    Miniaturization limits of piezoresistive MEMS accelerometers


    Contributors:
    Engesser, M. (author) / Franke, A. R. (author) / Maute, M. (author) / Meisel, D. C. (author) / Korvink, J. G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 12 ; 1835-1844


    Publication date :

    2009-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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