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    Title :

    A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drives


    Contributors:
    Yuan, Y. (author) / Du, H. (author) / Wang, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 6 ; 931-940


    Publication date :

    2010-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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