MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes
MICROSYSTEM TECHNOLOGIES ; 16 , 7 ; 1259-1268
2010-01-01
10 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Metrology of high aspect ratio MEMS
British Library Online Contents | 2004
|British Library Online Contents | 2000
|Silicon cantilever sensor for micro-/nanoscale dimension and force metrology
British Library Online Contents | 2008
|Low g Inertial Sensor based on High Aspect Ratio MEMS
British Library Conference Proceedings | 2005
|Fabrication of a ZnO piezoelectric micro cantilever with a high-aspect-ratio nano tip
British Library Online Contents | 2005
|