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    Title :

    MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes


    Contributors:
    Peiner, E. (author) / Doering, L. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 7 ; 1259-1268


    Publication date :

    2010-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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