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    Title :

    Electropolishing as a method for deburring high aspect ratio nickel RF MEMS


    Contributors:
    Kissling, S. (author) / Bade, K. (author) / Börner, M. (author) / Klymyshyn, D. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 8-9 ; 1361-1367


    Publication date :

    2010-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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