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    Title :

    Pt/3C-SiC electrothermal cantilever for MEMS-based mixers


    Contributors:
    Hassan, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 3 ; 425-428


    Publication date :

    2011-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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