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    Title :

    Development of piezoelectric MEMS deformable mirror


    Contributors:
    Sato, M. (author) / Tsuda, S. (author) / Kanno, I. (author) / Kotera, H. (author) / Tabata, O. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 5-7 ; 931-935


    Publication date :

    2011-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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