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    Title :

    Gold-based thin multilayers for ohmic contacts in RF-MEMS switches


    Contributors:
    Mulloni, V. (author) / Iannacci, J. (author) / Bartali, R. (author) / Micheli, V. (author) / Colpo, S. (author) / Laidani, N. (author) / Margesin, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 7/8 ; 965-971


    Publication date :

    2012-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Formation Of Ohmic Gold Contacts On Epitaxial GaAs

    Hecht, Michael H. / Bell, L. Doug / Kaiser, William J. | NTRS | 1991


    Ohmic contacts for laser diodes

    Ladany, I. / Marinelli, D. P. | NTRS | 1983



    MEMS optical switches

    Li Fan, / Husain, A. / Dobblelaere, P.D. et al. | IEEE | 2001


    Non-Invasive Optical Characterizations of OHMIC Contacts

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1994