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    Title :

    Ellipsometric measurement accuracy of ultrathin lubricant thickness on magnetic head slider


    Contributors:
    Zhao, J. M. (author) / Zhang, M. S. (author) / Yang, M. C. (author) / Ji, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 9/10 ; 1283-1288


    Publication date :

    2012-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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