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    Title :

    Single etch grating couplers for mass fabrication with DUV lithography


    Contributors:
    Halir, R. (author) / Zavargo-Peche, L. (author) / Xu, D. X. (author) / Cheben, P. (author) / Ma, R. (author) / Schmid, J. H. (author) / Janz, S. (author) / Densmore, A. (author) / Ortega-Moñux, A. (author) / Molina-Fernández, . (author)

    Published in:

    OPTICAL AND QUANTUM ELECTRONICS ; 44 , 12-13 ; 521-526


    Publication date :

    2012-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    537.5



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