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    Title :

    BPN a new thick negative photoresist with high aspect ratio for MEMS applications


    Contributors:
    Bourrier, D. (author) / Dilhan, M. (author) / Ghannam, A. (author) / Ourak, L. (author) / Granier, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 3 ; 419-423


    Publication date :

    2013-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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