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    Title :

    Void-free trench isolation based on a new trench design


    Contributors:
    Li, X. Y. (author) / Li, G. T. (author) / Ren, S. (author) / Qiao, D. Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 5 ; 757-761


    Publication date :

    2013-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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